Surface profile measurement using spatially dispersed short coherence interferometry
نویسندگان
چکیده
منابع مشابه
Surface profile measurement using spatially dispersed short coherence interferometry
Improved online techniques for surface profile measurement can be beneficial in high/ultra-precision manufacturing, in terms of enabling manufacture and reducing costs. This paper introduces a spatially dispersed short-coherence interferometer sourced by a super luminescent diode. This technique uses a broadband light source, which is spatially dispersed across a surface using a reflective grat...
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ژورنال
عنوان ژورنال: Surface Topography: Metrology and Properties
سال: 2014
ISSN: 2051-672X
DOI: 10.1088/2051-672x/2/2/024001